PI (Physik Instrumente) offers a new brochure on capacitive nanometrology displacement sensors and electronics. The brochure presents PI’s state-of-the-art sensor systems and also features a tutorial on single plate and dual plate capacitive sensors and an applications overview:

• Measuring Displacement with Nanometer Precision
• Nanopositioning / Closed-Loop Systems
• Parallel Metrology / High-Precision Multi-Axis Measurements
• Measuring Straightness and Flatness / Active Cross-Talk Compensation
• Out-of-Plane Measurement / Constant-Height Scans / Out-of-Round Measurement
• Tip / Tilt Measurement and Compensation
• Measuring Vibration, Flatness, Thickness
• Force Sensors with Micronewton Sensitivity
• Layer Thickness Measurement with Sub-Micron Accuracy

More Information:
The brochure is free of charge and can be ordered from PI; a PDF is also available for download at: http://www.physikinstrumente.com/en/products/capacitive_sensor/index.php