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Company profile | |
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| FHR Anlagenbau GmbH is a leading German supplier of equipment and technologies for the production of flat panel displays and other electronic components. The product spectra includes cluster tools, in-line machinery and roll to roll equipment for thin film deposition by PVD and Plasma-CVD as well as for etching of micro structures. FHR presents state of the art technologies for high rate reactive sputtering and a new developed patented targe area MaPE-ICP source for etching. FHR is also a leading supplier of large area sputtering targets. |
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MMG accepts no liability for statements by exhibitors or the content of advertising |  |
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