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Product and service categories |
| 1.1.4.2.15 Plasma coating systems |
| 1.1.4.2.16 Plasma polymerization units |
| 1.1.5.3 Etching plasma generators |
| 2.2.4 Microwave heating |
| 6.5.7.5 Plasma cleaning |
| 6.6.1.7 Microwave ovens |
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